Microelectromechanical systems (MEMS) are widely applied in common systems such an ink-jet printers and optical scanners, but recent research demonstrates exciting potential for development in fields such as biomedical technology. This book offers an up-to-date picture of key topics in the theory, fabrication, components and applications of MEMS. The first part presents new findings on microsensors, a key component in MEMS. The contributors provide new insights into a variety of types of microsensors, including planar oxygen sensors, magnetic microsensors, heat flux microsensors and glass capillary-based microsensors. In part two, the reader will find high-quality studies of central issues in microelectromechanical systems and devices. The contributors offer new findings on topics including the possibilities offered by flexible MEMS, the fabrication of piezoelectric thick films, thermal microactuators, and the characterization of MEMS based on optical measuring method. This collection of carefully selected expert research will be sure to fascinate readers in this diverse and growing area of mechanical engineering.
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