Microelectromechanical systems (MEMS) are now used in a range of diverse applications, such as microphones in mobile devices and accelerometers in vehicles and consumer electronics. Furthermore, MEMS technology has itself been the spur for innovation in various scientific areas.
This book discusses some key impacts that MEMS have had on technological development. Examples include optical MEMS, which have simplified the manufacture of semiconductors and improved the efficiency and speed of Internet communication, and the use of MEMS for development of micro-fluid devices such as pumps and injection systems for chemical analysis.
This book also describes some of the recent research that has been done on improving MEMS materials and microfabrication techniques, for example etching techniques and preparation of piezoelectric films.
Further chapters focus on specific applications that have been developed for MEMS technology, such as optical prostheses and cell lysis/DNA extraction. Several chapters will focus on MEMS-based microsensors and their use in a number of settings.
This book is a fascinating resource for researchers and practitioners in any discipline where MEMS are used, and also for developers who are working on new MEMS technology and MEMS-based processes.
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